Scientific Instrument and Equipment Design, Development

and Manufacturing from Hiden Analytical

Hiden Analytical is a leading manufacturer of quadrupole mass spectrometers for gas analysis, plasma characterisation and both research and for process engineering and surface science. The product range includes:

For ultra-high vacuum research:

Triple filter quadrupole mass spectrometers including:

• 3F series RGA systems
• PIC series with fast, high-sensitivity pulse ion counting detection
• EPIC series with pulse ion counting detection and pole bias control for positive and negative ion analysis
• MAXIM, a secondary ion mass spectrometer for UHV surface analysis and SNMS
• EQS SIMS probe, secondary ion mass spectrometer bolt on SIMS analyser
• IG20 ion gun
• IG5C caesium ion gun

For ultra-high vacuum through to sub-atmospheric process applications:

• HAL multifunction RGA Series
• HMT high pressure RGA process monitor
• HPR 30 differentially pumped system for operation to 5 mbar
• HPR 50 CVD diamond process analyser
• HPR 80 quantitative vacuum process gas analyser for reactive/corrosive species
• XBS flux rate control monitor for MBE
• IMP end-point detectors for ion-beam etch and reactive ion-beam etch end point control
• PSM plasma ion mass and energy analyser for plasma characterisation
• EQP plasma ion mass and energy analyser for plasma characterisation

Laboratory gas analysers:

• QIC Series laboratory style gas/vapour analysers
• QIC Biostream, hydra multi-stream gas/vapour analyser
• HPR 70 batch gas inlet system for gas analysis of discrete samples
• HPR 90 sealed package gas analyser with integral package cracker

Research-grade gas analysers:

• HPR 20 QIC Plus system with integrated calibration gas generation - gas analyser
• HPR 40 dissolved species analyser - membrane inlet mass spectrometer - MIMS
• HPR 60 molecular beam sampling mass spectrometer for atmospheric plasma analysis, gas analysis and gas reaction kinetics studies - MBMS
• CATLAB integrated gas analyser and microreactor for catalyst characterisation

UHV surface analysis:

- SIMS secondary ion mass spectrometer
- UHV temperature programmed desorption analysis system

• SIMS Workstation - A complete UHV surface analysis system
• MAXIM, a secondary ion mass spectrometer for UHV surface analysis and SNMS
• EQS SIMS probe, secondary ion mass spectrometer bolt on SIMS analyser
• IDP quadrupole mass spectrometer for electron and photon stimulated desorption
• IG20 ion gun
• IG5C caesium ion gun
• IFG200 FAB fast atom bombardment ion gun
• TPD Workstation - A system for UHV temperature programmed desorption

Catalyst Characterisation - Thermal Analysis TA-MS:

• CATLAB integrated gas analyser and microreactor for catalyst characterisation
• SPACI MS 3D catalyst characterisation system
• HPR 20 QIC R&D - A specialist gas analysis system for advanced research
• HPR 20 QIC TNS - A specialist gas analysis system for fast event transient analysis
• HPR 20 QIC EGA - A gas analysis system for evolved gas analysis

Plasma diagnostics and plasma characterisation - Ions - Neutrals - Radicals:

• EQP plasma ion mass and energy analyser for plasma characterisation
• PSM plasma ion mass and energy analyser for plasma characterisation
• ESPion advanced langmuir probe for plasma diagnostics
• ICP plasma reactor with integrated plasma diagnostics