Quadrupole mass spectrometers for advanced surface science, residual gas analysis and plasma characterization from Hiden Analytical

 

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Our worldwide contact point for plasma characterisation, catalysis studies, plasma characterization, surface science and residual gas analysis related enquiries: email Hiden with your application requirements and receive comprehensive technical information by return.

 

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Hiden Isochema
Hiden Isochema is a world leader in the design and manufacture of sorption instruments for research, development and production applications in surface chemistry and materials science. Read more...

 

Product Overview: from Surface Science to Quadrupole Mass Spectrometers

Hiden Analytical is a leading manufacturer of quadrupole mass spectrometers of all types. Our product range includes:

  • Residual gas analysis products
  • RGA Series for vacuum diagnostics and leak detection
  • HMT high pressure RGA for vacuum diagnostics and process monitoring
  • HPR-30 differentially pumped RGA for vacuum, process monitoring and leak detection
  • HPR-80 quantitative vacuum process gas analyser reactive/corrosive species
  • Triple Filter quadrupole mass spectrometers including:
    • 3F series triple filter RGA systems
    • PIC mass spectrometers with pulse ion counting detection
    • EPIC mass spectrometers with pulse ion counting detection and pole bias control and quadrupole mass spectrometer components
  • Process Control Systems (e.g. XBS – MBE deposition rate monitoring/control system, IMP – ion beam etch end point detector)
  • Laboratory Gas Analyzers (e.g. QIC-20 laboratory style gas/vapour analysers and Hydra multi-stream gas/vapor Analyzer)
  • Research Gas Analysers (e g. HPR 20 QIC Research Grade System for Continuous Sampling Gas/ Vapor Analysis)
  • HPR-40 Dissolved Species Analyser
  • HPR-50 CVD Diamond Process Analyzer
  • HPR-60 Molecular beam sampling mass spectrometer for atmospheric plasma analysis and atmospheric gas reaction kinetics studies.
  • HPR-70 Batch gas inlet system for analysis of low sample volume discrete gas samples.
  • HPR-90 Sealed Package Gas Analyser with Integral Package Cracker


In addition we offer gas sampling valves designed for residual gas analysis, catalyst and plasma characterization with CATLAB (an integrated microreactor and mass spectrometer system for catalyst characterization) and in-situ screening of catalyst activity and surface science (e.g. EQS SIMS-secondary ion mass spectrometer ‘Bolt-On’ probes)

Other areas include plasma characterization (e.g. EQP Mass / 45° sector field energy analyser for neutrals, radicals and ion analysis.