The IGAsorp CT Analyser : A New Automated Analyser for Climatic Testing of Electrical Components

New Gravimetric Analyser combines Moisture Sorption and TPR functions

Customer First

The Hiden SIMS Workstation

Hiden Analytical Ltd announces the launch of their SIMS Workstation. Secondary Ion Mass Spectroscopy (SIMS) is a powerful tool for resolving all kinds of surface analytical problems. The Hiden SIMS Workstation is a rugged, low cost, general purpose SIMS analysis station in a fully integrated bench.

With its fast entry load lock it provides rapid turnaround for all types of samples including alloys, polymers, semiconductors, pharmaceuticals and multilayered structures. A multiport UHV analysis chamber incorporates an Ion Gun, FAB Gun and a high sensitivity Quadrupole analyser, providing parts per billion elemental sensitivity and a depth resolution of less than 5 nm.

Additional spare ports provide extra flexibility and allow the possibility of customising the system to suit any individual application.

The powerful MASsoft Windows™ PC data system allows positive, negative and neutral spectra to be obtained in a single scan without any need for user intervention. It also provides an Ion Gun raster control for depth profiling applications.

For further information please use our contact page.

A Fully Automated Statistical Process Control RGA System - MASsoft SPC

Hiden Analytical are pleased to introduce the next generation RGA system - MASsoft SPC, a product for the new millennium providing fully automated vacuum process monitoring with QA quality SPC chart outputs ideally suited to the latest quality audit procedures, including ISO 9001.

MASsoft SPC requires zero RGA spectroscopy interpretation, with operator intervention limited to selection of a prescribed process run recipe. The system interfaces to the process tool to automatically acquire data for each critical process step. MASsoft SPC includes the flexibility to accommodate delays and changes to the process step routine ensuring highest quality data even when the process is halted or paused during a run.

The MASsoft SPC system automatically provides QA managers with statistical information identifying the key factors affecting the process, step by step, run by run, and tool by tool. X-Bar and Range Charts for the process gases and contaminants may now be viewed enabling long and short term trends to be established and compared, the data then being applied directly to preserve product quality and to identify tool maintenance scheduling.

The MASsoft SPC system can be expanded to include all the process tools of a facility, interconnected by Ethernet, to provide central data management and statistical process control together with local alarm outputs at each process tool location.

For further information please use our contact page.

The IGAsorp CT Analyser : A New Automated Analyser for Climatic Testing of Electrical Components

Moisture soaking of electrical components in accordance with Specification CEI/IEC 749:1996 requires precise control of temperature and humidity combined with accurate moisture content determination.

The IGAsorp CT analyser is designed specifically for such conformance testing of devices and materials, with precise control of temperature to 85^oC and humidity environments to 95% RH. Moisture content is measured by in-situ micro-weighing with resolution to 0.1 microgram, and both equilibrium uptake and the kinetics of water diffusion are measured simultaneously. Sample capacities to 5gm are accommodated.

Multiple test routines are pre-programmed for alternative climatic conditions, soak times and measurement cycle repetitions. The unique IGAsorp CT real-time analysis method automatically minimises test time by predicting the equilibrium timescale from the measured kinetic response of the component.

The compact, benchtop system introduces an automated routine analytical technique suited to both the QC and research laboratory.

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PSM Series - Advanced Plasma Sampling Mass Spectrometers

Hiden Analytical are pleased to announce the introduction of the PSM System series - the new generation of Advanced Plasma Sampling Mass Spectrometers the simultaneous determination of generated plasma species and concurrent ion energy distributions. Direct plasma orifice sampling and combined differential pumping enable systems to address multiple process pressure regimes from 10^-4 mbar to 100 mbar, the ion extraction and energy filtering elements optimising the characterisation of process gases, plasma ions and neutral species.

Process gas monitoring is enhanced with entry optic rejection lenses, prohibiting performance degradation by background plasma ion transmission. Plasma ions are monitored directly for measurement of both positive and negative ions. The integrated energy filter determines the energy spectrum and optimum transmission parameters for any selected ion species

All systems feature triple-stage mass analysers and fast wide-range pulse ion counting detectors. The multiple scan generation (DMM) mode combines any user-selected continuous sequence of positive ion, negative ion, mass, energy and neutrals determinations. Mass range options extend to 2500 amu.

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The Hiden HPR-20 QIC Gas Analysis System

Hiden Analytical announce the release of the HPR-20 QIC - a new compact, bench top gas analyser for precise analysis of gas mixtures and process environments in the pressure range from atmosphere to 10 mbar. The system, featuring the all-new QIC sampling interface and Hiden MASsoft Windows™ software suite, is ideally suited to applications in Thermal Analysis Mass Spectrometry, Reaction Kinetics and Catalysis Studies, Temperature Programmed Desorption Experiments and Gas Purity Analysis.

The unique QIC sampling interface combines quartz and platinum wetted surfaces with a minimal internal volume of 0.1 cm³ for negligible memory and optimum response and recovery, together with low sample consumption rates down to 1 atm. cm³/sec and detection capability to part-per-billion levels.

The standard system incorporates the Hiden 201 RC quadrupole mass spectrometer with mass range to 200 amu, with ranges to 300 amu and 500 amu optional. All systems feature easy set-up and operation, wide dynamic range and proven stability and reliability.

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The Hiden 3F/1000 Series Quadrupole Mass Spectrometer

The new Hiden 3F/1000 series high-power, high performance quadrupole mass spectrometers offer optimum sensitivity and mass resolution for mass range applications to 2500 amu.

The triple-stage mass filter is available withpole diameters of 9 mm and 12 mm. Coupled with the 200 W state-of-the-art RF power source operating at frequencies to 5 MHz performance is optimised from low mass to high mass for measurements as diverse as Deuterium/Tritium and cluster analyses.

Systems are compatible with the full Hiden accessory range including gas and molecular beam ion sources, axial and sector field energy analysers, wide-range pulse ion counting detectors and integrated UHV vacuum stages, enabling direct sampling of ions, neutrals and radicals from processes at vacuum to atmospheric pressure. The MASsoft Windows™ control program with Dynamic Multimode Scanning features automated studies of appearance potential, ion energy distribution and electron attachment processes.

Applications are diverse and include precision gas analysis, molecular beam monitoring, plasma, flame and surface characterisation.

The Hiden EPIC Series Quadrupole Mass Spectrometer

Hiden Analytical announces the opening of a new Sorption Analysis Laboratory

Examples of commercial samples analysed include:

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Microgravimetric Gas/Vapour Sorption Analyser for Adsorbent Testing

Introducing Hiden RC RGA systems

The ‘Hands Free’ Automated Process Monitors with SPCsoft integrated Statistical Process Control.

RC RGA systems from Hiden Analytical are completely remote controlled, providing totally hands free operation with data storage, data interpretation and statistical control reports generated automatically from process step to process step.

The RC system includes a programmable intelligent interface unit which is easily integrated to your specific process requirement. In vacuum brazing, for example, the RC RGA is logic controlled to acquire data from a specific point of the process temperature ramp and finish data collection after the work piece has cooled to a safe temperature. Data is collected into a database which can be viewed using the Hiden supplied browser or other client compatible browsers, Paradox™, for example. Statistical data control charts are automatically built from process run to run and product batch to batch without operator intervention.

The RC RGA operates from prescribed recipes which are typically set up together with Hiden’s application support group in consultation with the on site process engineers ensuring that the

systems collect the important process data automatically. The new Dynamic Multi-Mode scan acquires both broad mass scans with trend analysis of the critical species simultaneously ensuring that the total vacuum quality is continuously monitored. Data is carefully managed with standard x-bar/R statistical control charts identifying the mean and standard deviation of the partial pressure levels for each critical process step on a process run by process run basis.

Out of limit alarms alert process operators to the precise nature of any process deviations, and an onboard events log, time and date stamps each process step, and includes a detailed record of any out of limit messages posted. A comment facility allows the operator to enter text messages pertinent to the specific run.

The software operates on MS Windows NT ™ and is Ethernet based providing for simultaneous monitoring and Statistical Process Control of multiple process tools from one control PC . Ethernet capability provides the capacity to monitor the vacuum processes of an entire wafer FAB or vacuum process plant from any point on a standard network.

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Hiden Analytical announces the release of the Series 1000 EQP, a high sensitivity combined ion energy analyser and quadrupole mass spectrometer designed specifically for the characterisation of plasma processes.

The EQP system combines a high performance, triple filter, quadrupole mass spectrometer with a 45º sector field energy analyser, integral RGA ioniser and wide dynamic range pulse counting Channeltron detector, providing mass range capability up to 3000 amu , energy range options to 1000eV, and externally floatable to 10KeV.

Standard configurations include magnetically shielded systems for operation in magnetically confined plasma, and extended probe versions for translation across large plasma reactor chambers.

The Series 1000 EQP systems are offered with a new range of options and accessories including a powered sampling electrode for in-situ plasma studies to precisely identify the wafer or work piece environment, and electron attachment ionisation for detailed studies of electronegative reaction products. These species are extremely important as many of the gases used in plasma processing are electronegative, for example: fluorocarbons, methane, sulphur hexafluoride and silane, and the species formed through electron attachment can give much needed information on both the mechanism and control of etching and deposition processes.

The EQP operates under the control of Hidens Windows based MASsoft PC software which provides for automatic measurement, real time display and storage of the mass and energy spectra observed from the species present in the plasma. It is the user friendly comprehensive nature of the MASsoft operating software which ensures that the EQP system is the ideal tool for plasma characterisation.

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New Gravimetric Analyser combines Moisture Sorption and TPR functions

Hiden Analytical announce the release of the latest addition to the IGA range of Gravimetric instruments. The IGASorp is a high performance automated sorption analyser with a built-in rapid response thermal ramp controller operating under the control of Windows™ applications software.

The system features automatic isotherm determination on solid and liquid samples at humidity set-points up to 95% RH, combined with temperature programmed reaction (TPR) studies up to 250°C. Thermal ramp rates from 0.1°C/min. to 10°C/min. ensure optimum sample analysis times from the base temperature of 5°C.

The new IGASorp provides for a wide range of complex analyses including in-situ materials activation, hydration-dehydration studies, thermal cycling/thermal desorption and service lifetime studies. The rapid response heating system can also reduce sample drying times and the associated measurement time for routine analysis.

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Customer First

Hiden Analytical, manufacturer of high performance quadrupole mass spectrometers and gravimetric analysers, is pleased to announce:

- our new concept in Customer Care.

Hiden Analytical is committed to Total Customer Care. A generation of academic and industrial users around the world have benefited from access direct to our most experienced specialists.

The company has expanded 3-fold in less than five years, now encompassing the technologies of plasma/surface science, vacuum and gas analysis and thermo-gravimetric analysis, and to maintain our principle of Total Customer Care we introduce a new tier of customer support:

All users will be allocated a specialist, first-line contact for all instrument information and application support. YOUR personal contact to ensure you get the most from your instrument and process.

Our goal is to ensure that all our customers, world wide, benefit from Hiden's application experience, and go on to create ground breaking research, generate increased process yields and improve product quality.

Join Hiden in our drive for improved process knowledge, understanding and optimization.

For further information please use our contact page.