Quadrupole mass spectrometers for advanced surface science, gas analysis, RGA and plasma characterization from Hiden Analytical

Hiden Analytical is a leading manufacturer of quadrupole mass spectrometers for both research and for process engineering. The product range includes:

For ultra-high vacuum research:

 Triple filter quadrupole mass spectrometers including:

• 3F series RGA systems
  
• PIC series with fast, high-sensitivity pulse ion counting detection
  
• EPIC series with pulse ion counting detection and pole bias control for positive and negative ion analysis
  
• MAXIM and EQS SIMS probes
  
• IG-20 gas and IGC-5 caesium ion guns
  

For ultra-high vacuum through to sub-atmospheric process applications:

• HAL multifunction RGA Series
• HMT high pressure RGA process monitor
  
• HPR-30 differentially pumped system for operation to 5 mbar
  
• HPR-50 CVD diamond process analyzer
  
• HPR-80 quantitative vacuum process gas analyser for reactive/corrosive species
  
• XBS flux rate control monitor for MBE
  
• IMP end-point detectors for ion-beam etch and reactive ion-beam etch end point control
  
• EQP and PSM plasma ion mass / energy analysers for plasma characterisation.
  

Laboratory gas analyzers

• QIC-20 laboratory style gas/vapour analyzers
  
• Hydra multi-stream  gas/vapor analyzer
  
• HPR-70 batch gas inlet system for gas analysis of discrete samples.
  
• HPR-90 sealed package gas analyzer with integral package cracker
  

Research-grade gas analysers

• HPR 20 QIC Plus system with integrated calibration gas generation- Gas Analayzer.
• HPR-40 dissolved species analyzer- Membrane inlet mass spectrometer - MIMS.
  
• HPR-60 molecular beam sampling mass spectrometer for atmospheric plasma analysis, gas analysis and gas reaction kinetics studies- MBMS.
• CATLAB integrated gas analyzer and microreactor for Catalyst Characterisation.
  

UHV Surface Analysis - SIMS Secondary Ion Mass Spectrometry

• SIMS Workstation - A complete UHV surface analysis system.
  
• MAXIM and EQS SIMS probes
  
• IDP Quadrupole mass spectrometer for electron and photon stimulated desorption
  
• IG-20 gas and IGC-5 caesium ion guns
  
• IFG 200 Ion FAB gun
  

Catalyst Characterization - Thermal Analysis TA-MS

• CATLAB integrated gas analyzer and microreactor for Catalyst Characterisation.
  
• SPACI-MS 3D Catalyst Characterisation system
  
• HPR 20 QIC -EGA Evolved gas analyser for TGA-MS and TA -MS.

Plasma diagnostics and characterization - Ions - Neutrals -Radicals

• EQP  plasma ion mass / energy analyser for plasma characterisation.
  
• PSM Plasma ion analyser
  
• ESPion Advanced Langmuir Probe
  
• ICP Plasma Reactor with integrated plasma diagnostics