Semiconductor fabrication includes a wide range of vacuum, gas and plasma processes that require high performance process development and process monitoring for advancing manufacturing processes and increasing production yields.

Applications

 

Residual Gas Analysis

Analysis of gas and vapour species

End Point Detection

Ion Milling Probe - SIMS End Point Detection for Ion Beam Etch.

Plasma Characterisation

Get detailed information relating to plasma reaction chemistry.

Surface Science

High sensitivity detection for the most demanding XHV/UHV environments.

MBE Deposition Rate Monitoring and Control

XBX-flux rate deposition monitor for MBE process control.