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Residual Gas Analysis is a general term for the analysis of gas and vapour species in vacuum chambers and vacuum processes.
The Hiden RC and LC series quadrupole mass spectrometers provide for routine, fast, wide dynamic range residual gas analysis, measuring the partial pressures of the species that are critical to vacuum quality and process requirements.
Applications include:
- vacuum chamber leak detection
- vacuum quality measurement and monitoring
- virtual leak detection
- outgassing studies
- bakeout cycle/vacuum pump down monitoring
Products
RGA series quadrupole mass spectrometers.
HMT High pressure residual gas analyser.
Triple filter high performance quadrupole mass spectrometers.
Vacuum process gas analyser.
Quadrupole mass spectrometer components.
Presentations
A Brief Guide to the MASsoft Software (772K)

Application Notes
Partial Pressure Control in Reactive Sputtering (200K)
Technical Information
3F Series Quadrupole Mass Spectrometer Dimensions (290K)
Leak Detection in 3 Clicks with RC RGA Systems (52K)
Quadrupole Mass Spectrometers for RGA, Gas Analysis and Process Monitoring (681K)
RGA Series Quadrupole Mass Spectrometer Dimensions (44K)
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