Residual Gas Analysis is a general term for the analysis of gas and vapour species in vacuum chambers and vacuum processes.

The Hiden RGA series quadrupole mass spectrometers provide for routine, fast, wide dynamic range residual gas analysis, measuring the partial pressures of the species that are critical to vacuum quality and process requirements.

Applications include:

• vacuum chamber leak detection
• vacuum quality measurement and monitoring
• virtual leak detection
• outgassing studies
• bakeout cycle/vacuum pump down monitoring

Products

RGA Series

RGA series quadrupole mass spectrometers.

HMT100-RC

HMT High pressure residual gas analyser.

3F Series

Triple filter high performance quadrupole mass spectrometers.

HPR-30

Vacuum process gas analyser.

Components

Quadrupole mass spectrometer components.

A Brief Guide to the MASsoft Software (772K)

Partial Pressure Control in Reactive Sputtering (200K)

3F Series Quadrupole Mass Spectrometer Dimensions (290K)

Leak Detection in 3 Clicks with RC RGA Systems (52K)

Quadrupole Mass Spectrometers for RGA, Gas Analysis and Process Monitoring (681K)

RGA Series Quadrupole Mass Spectrometer Dimensions (44K)