Nanotechnology is research and technology development at the atomic, molecular or macromolecular levels, in the length scale of approximately 1 - 100 nanometre range, combined with creating and using structures, devices and systems that have novel properties and functions because of their small and/or intermediate size and with the ability to control or manipulate on the atomic scale.

Hiden’s quadrupole mass spectrometers provide vacuum, plasma and surface analysis in nanotechnology applications, including SIMS depth profiling of nanometre scale thin film structures, plasma characterisation for enhancement of device etch processes, and vacuum diagnostics / temperature programmed desorption analysers in UHV scanning tunnelling microscopes.

Products

 

SIMS Workstation

A complete SIMS analysis facility.

XBS

MBE Deposition Rate Monitoring and Control

Components

Quadrupole mass spectrometer components.

 SIMS Brochure TI 181 (670K)

 SIMS Brochure TI 181 HiRes (5.64MB)

Charged Particle Analysis in Plasma Assisted Processes (597K)

EQS vs EPIC - Ion Energy Distributions (272K)

Data/Control Inputs and Outputs and Special Applications (16K)

Example Data - End Point Detection (58K)