A rugged general purpose SIMS and SNMS analysis station

Rapid turnaround of all types of samples Static and dynamic SIMS Integral ioniser for SNMS and RGA Choice of Ion guns SNMS surface mapping / imaging Surface contamination analysis Quantification of matrix level by SNMS Flexible and upgradeable configuration Low cost of ownership

The Hiden SIMS Workstation, an integrated UHV / SIMS facility for advanced surface analysis, featuring:

• Hiden MAXIM SIMS analyser operating under MASsoft for ppb analysis.
• Integrated ioniser for efficient SNMS analysis.
• Choice of differentially pumped Hiden IG20 Gas, IG-5C Caesium, IFG200 FAB or high performance liquid gallium guns as primary excitation source.
• Integral ion gun raster control with signal gating for depth profiling.
• Electron flood gun option for charge neutralisation in insulator studies.
• Vacuum chamber bakeout heaters.
• Fast sample transfer, sample holder and manipulator with load lock.
• UHV manipulator for optimum sample positioning.
• SIMS elemental imaging option with ESM LabVIEW SIMS Imaging program.
• Static SIMS Spectral Library available.
• Automatic SIMS ion optics lens tuning, and automatic mass alignment for optimum SIMS performance.

 Mass Spectrometers for Thin Films, Plasma and Surface Engineering (1.1MB)

SIMS Brochure TI 181 (670K)

 SIMS Brochure TI 181 HiRes (5.64MB)

 Tour of the Hiden SIMS Workstation (6215K)

 Secondary Ion Mass Spectrometry - Glass Coatings (30K)

 Secondary Neutrals Analysis (301K)

 SIMS - Imaging of Semiconductor Contact Pads (493K)

 SNMS - Depth Profile of Hard Drive Platter (560K)

 Sputtered Neutral Mass Spectrometry - Magnetic Layers (89K)

 Tour of the Hiden SIMS Workstation (6215K)