SIMS - for depth profiling, surface composition measurement, and elemental imaging, Hiden's SIMS Workstation provides a complete analytical facility.

Products

 

SIMS Workstation

A complete SIMS analysis facility.

MAXIM Quadrupole SIMS Analyser

For static and dynamic SIMS applications.

IFG Series Ion and Ion/FAB Guns

For surface and depth analysis applications.

EQS SIMS

'Bolt-On' probes.

3F Series

Triple filter high performance quadrupole mass spectrometers.

PIC Mass Spectrometers

Pulse ion counting detection.

RGA Series

RGA series quadrupole mass spectrometers.

SIMS - Secondary Ion Mass Spectrometers (1676K)

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Energetic (Fast) Neutral Species Analysis (96K)

Energy Distributions of Ions and Atoms from a Magnetron Source (174K)

EQP/EQS Time Resolved Studies in Ion Beam Etch and Plasma Processes (248K)

EQS vs EPIC - Ion Energy Distributions (272K)

Fast Neutrals Analysis (302K)

Data/Control Inputs and Outputs and Special Applications (18K)

EPIC 1000 Series Dimensions (42K)

EQS 1000 Series Probe Schematic (80K)

EQS 300/500 Series Probe Schematic (54K)

SIMS Imaging FoV Schematic (62K)

UHV TPD Custom Shrouds (2752K)

3F/PIC Systems for UHV Temperature Programmed Desorption (85K)

IG20 Ion Gun for Dynamic SIMS (62K)

IMP End Point Detector System for Ion Beam Etch Applications (279K)

SIMS Images (2219K)

SIMS Workstation & Bolt-On Components (4320K)