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SIMS - Pour l'analyse en profondeur, les mesures de la composition des surfaces et pour l'imagerie isotopique, la Station de Travail SIMS de chez Hiden fournit une solution analytique complète.
Produits
A complete SIMS analysis facility. For static and dynamic SIMS applications. For surface and depth analysis applications. Triple filter high performance quadrupole mass spectrometers. Pulse ion counting detection. RGA series quadrupole mass spectrometers.
Brochures
SIMS - Secondary Ion Mass Spectrometers (1676K)
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Notes d'Application
Energetic (Fast) Neutral Species Analysis (96K)
Energy Distributions of Ions and Atoms from a Magnetron Source (174K)
EQP/EQS Time Resolved Studies in Ion Beam Etch and Plasma Processes (248K)
EQS vs EPIC - Ion Energy Distributions (272K)
Fast Neutrals Analysis (302K)
Informations Techniques
Data/Control Inputs and Outputs and Special Applications (18K)
EPIC 1000 Series Dimensions (42K)
EQS 1000 Series Probe Schematic (80K)
EQS 300/500 Series Probe Schematic (54K)
SIMS Imaging FoV Schematic (62K)
UHV TPD Custom Shrouds (2752K)
Spécifications
3F/PIC Systems for UHV Temperature Programmed Desorption (85K)
IG20 Ion Gun for Dynamic SIMS (62K)
Présentations
IMP End Point Detector System for Ion Beam Etch Applications (279K)
SIMS Images (2219K)
SIMS Workstation & Bolt-On Components (4320K)
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