Accueil Applications
Analyse de Surface

SIMS - Pour l'analyse en profondeur, les mesures de la composition des surfaces et pour l'imagerie isotopique, la Station de Travail SIMS de chez Hiden fournit une solution analytique complète.



Produits


A complete SIMS analysis facility.
For static and dynamic SIMS applications.
For surface and depth analysis applications.
Sondes "Prête à Monter".
Triple filter high performance quadrupole mass spectrometers.
Pulse ion counting detection.
RGA series quadrupole mass spectrometers.



Brochures


icon SIMS - Secondary Ion Mass Spectrometers (1676K)



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Notes d'Application


icon Energetic (Fast) Neutral Species Analysis (96K)

icon Energy Distributions of Ions and Atoms from a Magnetron Source (174K)

icon EQP/EQS Time Resolved Studies in Ion Beam Etch and Plasma Processes (248K)

icon EQS vs EPIC - Ion Energy Distributions (272K)

icon Fast Neutrals Analysis (302K)



Informations Techniques


icon Data/Control Inputs and Outputs and Special Applications (18K)

icon EPIC 1000 Series Dimensions (42K)

icon EQS 1000 Series Probe Schematic (80K)

icon EQS 300/500 Series Probe Schematic (54K)

icon SIMS Imaging FoV Schematic (62K)

icon UHV TPD Custom Shrouds (2752K)



Spécifications


icon 3F/PIC Systems for UHV Temperature Programmed Desorption (85K)

icon IG20 Ion Gun for Dynamic SIMS (62K)



Présentations


icon IMP End Point Detector System for Ion Beam Etch Applications (279K)

icon SIMS Images (2219K)

icon SIMS Workstation & Bolt-On Components (4320K)