Accueil Applications
UHV Surface Science

SIMS - for depth profiling, surface composition measurement, and elemental imaging, Hiden's SIMS Workstation provides a complete analytical facility.

 

RGA - The Hiden quadrupole mass spectrometers provide high sensitivity detection capability for the most demanding XHV/UHV vacuum environments. The pulse ion counting detector enables measurement of both positive and negative ions through 7 continuous decades, the integral accumulation mode being used for the capture of discreet particle events.

 

UHV Temperature Programmed desorption studies (TPD) - Hiden Analytical’s 3F/PIC mass spectrometers with pulse ion counting detection are available configured specifically for UHVTPD providing fast, wide dynamic range detection of multiple species, capturing the entire desorption event. The temperature ramp data is automatically acquired simultaneously with the mass spectral data.

 

The Hiden IDP ion desorption probe is a quadrupole mass spectrometer configured for analysis of low energy ions in electron and photon stimulated desorption studies.

 

 

Products

 

'Bolt-On' probes.
A complete SIMS analysis facility.
Pulse ion counting detection and pole bias control.
Triple filter high performance quadrupole mass spectrometers.
Electron and Photon Induced Desorption Studies.
Pulse ion counting detection.
RGA series quadrupole mass spectrometers.

 

 

Brochures

 

icon SIMS - Secondary Ion Mass Spectrometers (1676K)

 

 

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Application Notes

 

icon Energetic (Fast) Neutral Species Analysis (96K)

icon Energy Distributions of Ions and Atoms from a Magnetron Source (174K)

icon EQP/EQS Time Resolved Studies in Ion Beam Etch and Plasma Processes (248K)

icon EQS vs EPIC - Ion Energy Distributions (272K)

icon Fast Neutrals Analysis (302K)

 

 

Technical Information

 

icon Data/Control Inputs and Outputs and Special Applications (18K)

icon EPIC 1000 Series Dimensions (42K)

icon EQS 1000 Series Probe Schematic (80K)

icon EQS 300/500 Series Probe Schematic (54K)

icon SIMS Imaging FoV Schematic (62K)

icon UHV TPD Custom Shrouds (2752K)

 

 

Product Specification

 

icon 3F/PIC Systems for UHV Temperature Programmed Desorption (85K)

 

 

Presentations

 

icon IMP End Point Detector System for Ion Beam Etch Applications (279K)

icon SIMS Images (2219K)

icon SIMS Workstation & Bolt-On Components (4320K)