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A UHV Surface Analysis System for Thin Film Depth Profiling
The Hiden SIMS Workstation is a stand-alone, general purpose, UHV SIMS/SNMS analysis system based around the MAXIM analyser. The instrument is both powerful and easy to use with a self-tuning secondary ion column and software controlled ion guns.
Rapid turnaround of all types of samples
Static and dynamic SIMS
Integral ioniser for SNMS and RGA
Choice of Ion guns
SNMS surface mapping / imaging
Surface contamination analysis
Quantification of matrix level by SNMS
Flexible and upgradeable configuration
Low cost of ownership
The Hiden SIMS Workstation, an integrated UHV / SIMS facility for advanced surface analysis, featuring:
Hiden MAXIM SIMS analyser operating under MASsoft for ppb analysis
Intergrated ioniser for efficient SNMS analysis
Choice of differentially pumped Hiden IG20 Gas, IG-5C Caesium, IFG200 FAB or high performance liquid gallium guns as primary excitation source
Integral ion gun raster control with signal gating for depth profiling
Electron flood gun option for charge neutralisation in insulator studies
Vacuum chamber bakeout heaters
Fast sample transfer, sample holder and manipulator with load lock
UHV manipulator for optimum sample positioning
SIMS elemental imaging option with ESM LabVIEW SIMS Imaging program
Static SIMS Spectral Library available
Automatic SIMS ion optics lens tuning, and automatic mass alignment for optimum SIMS performance
