Hiden IG20 Ion Gun

State of the art ion gun for surface and depth analysis applications.

• Static and Dynamic SIMS
• Auger Electron Spectroscopy
• Ion Beam Sputtering
• Surface Science Studies
• Rastering / Depth Profiling

 

The Hiden IG20 Ion Gun for static and dynamic SIMS, featuring:

 

• Intense ion beam with 100 µm spot size and energies from 0.5 – 5 keV.
• High current density, up to 4.5 mA/cm².
• Electron impact ion source with Argon and Oxygen capability.
• Steering optics for line scattering and beam rastering in depth profiling.
• 3° offset in the ion gun column for optimum rejection of neutrals.
• Beam blanking facility for rapid beam switching in rastering applications.
• Source differential pumping for reduced chamber gas load.
• Easily replaceable twin filament assembly.
• Sweep rates down to 64 µs.
• Integrated operation with SIM and EQS probes for direct raster rate / area control.

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