Product Catalog

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Hiden EPIC Systems with Pulse Ion Counting and Pole Bias Control

EPIC 3F quadrupole

Triple Filter Quadrupoles for Precision Gas Analysis and Scientific Applications.

  • Neutrals, Radicals, Positive & Negative ions.
  • Electron Attachment Studies.
  • Surface Science, Molecular Beam Studies.
  • UHV Temperature Programmed Desorption.
  • High Performance RGA.
  • Desorption / Outgassing studies / Bakeout cycles.
  • Chamber / Process gas Contaminants

 

Hiden EPIC mass spectrometers for high precision scientific, process applications and UHV analysis of neutrals, radicals, and ions, featuring:

 

  • High Sensitivity, Enhanced detection from 100% to 5ppb.
  • Mass range options to 2500 amu, 6,9 or 12 mm pole diameter options.
  • Enhanced long-term Stability (less than ±0.5% height variation over 24 h).
  • Ion Energy distribution by mid-axis potential scanning ±100 V, 1000 eV Option.
  • Ion source control for soft ionisation and appearance potential mass spectrometry.
  • Enhanced sensitivity for high mass transmission, Automatic mass scale alignment.
  • Pulse Ion Counter for continuous 7 decade dynamic range, Faraday option to 5x1010
  • Enhanced contamination resistance via the RF-only pre-filter stage.
  • Signal gating 1µs resolution for energy & mass distributions vs time or TOF studies.
  • Temperature reading integrated into data displays for thermal desorption applications.
  • Integral UHV compatible shroud, Liquid Nitrogen cooled shroud option.
  • MASsoft control via RS232, RS485 or Ethernet LAN.
  • Upgradeable to Plasma / SIMS specification.

 

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