EQP reference
Published Papers
Plasma Diagnostics
Some Published Papers
Applications of the Hiden EQP
PLASMA CHARACTERISATION & SOURCE STUDIES | |
| A1 | Ion kinetics in collisional RF-glow discharge sheaths Michael Zeuner, Jürgen Meichsner, Technical University Chemnitz, Department of Physics, PSF 964, 09009 Chemnitz, Germany. Vacuum, Volume 46, Number 2, Pages 151 to 157, 1995. |
| A2 | Kinetic-energy distributions of ions samples from Argon plasmas in a parallel-plate RF reference cell J.K. Olthoff, R.J. Van Brunt, S.B. Radovanov, J.A. Rees*, R. Surowiec* National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA *Dept of Electrical Engineering and Electronics, University of Liverpool, Liverpool L69 3BX, UK J. Appl. Phys. 75 (1), 1 January 1994 |
| A3 | Use of an ion energy analyser-mass spectrometer to measure ion kinetic-energy distributions from RF discharges in Argon-Helium gas mixtures J.K. Olthoff, R.J. Van Brunt, S.B. Radovanov, J.A. Rees* National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA. *Dept of Electrical Engineering and Electronics, University of Liverpool, Liverpool L69 3BX, UK IEE Proc.-Sci. Meas. Technol., Vol. 141, No. 2, March 1994 |
| A4 | Ion kinetic-energy distributions and Balmer-alpha (Ha) excitation in Ar-H2 radio frequency discharges S. B. Radovanov, J. K. Olthoff, R. J. Van Brunt and S. Djurovic National Institute of Standards and Technology, Gaithersburg, MD 20899 Submitted to J. Applied Physics 20th October, 1994: |
| A5 | Reconstruction of the time-averaged sheath potential profile in an Argon RF plasma using the ion energy distribution M. Fivaz, S. Brunner, W. Schwarzenback, A. A. Howling & Ch. Hollenstein Centre de Recherches en Physique des Plasmas, Ecole Polytechnique Fédérale de Lausanne, 21 av. des Bains, CH-1007 Lausanne, Switzerland Accepted for publication in Plasma Sources, Science & Technology Technol. 4 |
| A6 | Breakdown, steady-state & decay regimes in pulsed Oxygen Helicon diffusion plasmas C. Charles & R. W. Boswell Plasma Research Laboratory, Research School of Physical Sciences & Engineering, Australian National University, ACT 0200, Australia Submitted to J.A.P. |
| A7 | Ion energy distributions in an RF-DC-triode glow discharge Michael Zeuner & Jürgen Meichsner Technische Universität Chemnitz-Zwickaw, Institut für Physik, 09107 Chemnitz, Germany Submitted to Surface & Coating Technology |
| A8 | Mass spectra of positive & negative ions in RF discharge of SF6 gas Kazuya Nagaseki, Itsuo Ishikawa, Eiichi Nishimura, Yukinori Saito & Shinji Suganomata Faculty of Engineering, Yamanashi University, Takeda, Kofu 400. |
| A9 | Sheath impedance effects in very high frequency plasma experiments W. Schwarzenbach, A.A. Howling, M. Fivaz, S. Brunner & Ch. Hollenstein Centre de Recherches en Physique des Plasmas, Ecole Polytechnique Fédérale Lausanne, Av. des Bains 21, CH-1007 Lausanne, Switzerland Submitted for publication in Journal of Vacuum Science & Technology A. |
| A10 | Negative ions in 13.56 MHz discharge of SF6 gas in a planar diode Kazuya Nagaseki, Itsuo Ishikawa, Eiichi Nishimura1, Yukinori Saito & Shinji Suganomata Faculty of Engineering, Yamanashi University, Takeda, Kofu 400, Japan 1 Tokyo Electron Yamanashi Ltd., Fujii-Machi, Nirasaki 407, Japan Jpn. J. Applied Physics, Vol. 34 (1995) page L852 to L855. |
| A11 | Energy transfer from an Argon plasma to a polystyrene surface Richard M. France & Robert D. Short Dept. of Engineering Materials, University of Sheffield, P.O. Box 600, Sir Robert Hadfield Building, Mappin Street, Sheffield, S1 4DUf |
| A12 | Design of ion energy eistributions by a DC biased RF discharge and a broad beam ion source Michael Zeuner, Jürgen Meichsner Technische Universität Chemnitz, Institut für Physik, D-09107 Chemnitz, Germany Presented at 12th ISPC Minneapolis 1995. |
| A13 | Design of ion energy distributions by a broad beam ion source Michael Zeuner, Jürgen Meichsner, Horst Neumann*, Frank Scholze*, Frieder Bilg* Technische Universität Chemnitz-Zwickau, Institut für Physik, D-09107 Chemnitz, Germany *Instut für Oberflächenmodifizierung (IOM), Permoser Straße 15, 04318 Leipzig, Germany Presented to Journal of Applied Physics. |
| A14 | Negative Oxygen ions generated in a plasma sheath M. Zeuner, J. Meichsner, J.A. Rees* Technische Universität Chemnitz, Institut für Physik, D-09107 Chemnitz, Germany *Hiden Analytical Ltd and SCILAS, University of Liverpool, U.K. Submitted to Applied Physics Letters. |
| A15 | High energetic negative ions in RF discharges M. Zeuner, J. Meichsner, J. A. Rees* *Hiden Analytical Ltd and SCILAS, University of Liverpool, U.K. Technische Universität Chemnitz, Institut für Physik, D-09107 Chemnitz, Germany Submitted to Applied Physics Letters. |
| A16 | Optical and mass spectrometric investigations of ions and neutrals in SF6 radio-frequency discharges R. Foest - Institut für Niedertemperatur-Plasmaphysik, D-17489 Griefswald, Germany J.K. Olthoff, R.J. Van Brunt, E. Benck & J.R. Roberts| National Institute of Standards & Technolgy|, Gaithersburg, Maryland 20899, USA To be submitted to Physics Review |
| A17 | Ion energy distributions in oxygen and argon in a pulsed mode RF discharge Michael Zeunera, Horst Neumanna, Jurgen Meichsnerb aInstitut für Oberflächenmodifizierung e.V., Permoser Straße 15, D-04318 Leipzig, Germany bInstitut für Physik, Technische Universitäte Chemnitz, D-09107 Chemnitz, Germany Vacuum, volume 48, number 5, pages 443 - 447, 1997. |
| A18 | Effect of electrode material on measured ion energy distributions in radio-frequency discharges J.K. Olthoff, R.J. Van Brunt, and S.B. Radovanova) National Institute of Standards and Technologyb) Gaithersburg, Maryland 20899 Received 3 February, 1995; accepted for publication 12 May. 1995 |
| A19 | Pressure & electrode distance effects on ion energy distributions in RF discharges Michael Zeuner, Horst Neumann, Jurgen Meichsner* Institut für Oberflächenmodifizierung e.V., Permoser Straße 15, D-04318 Leipzig, Germany *Institut für Physik, Technische Universitäte Chemnitz, D-09107 Chemnitz, Germany Jpn. J. Appl. Phys. Vol. 36 (1997) pp. 4711-4716 - Part 1, No. 7B, July 1997. |
| A20 | Effects of the axial external magnetic field on the reduction of the dielectric window damage due to capacitive coupling the inductively coupled plasma Jung-Hun Kim, Ho-Jun Lee, Youn-Taeg Kim, Ki-Woong Whang, Jung-Hoon Joo* School of Electrical Engineering, Seoul National University, Kwanak-ku, Shinlim-dong San 56-1, Seoul, Korea *Department of Materials Science & Engineering, Kunsun National University, Miryongdong San 69-1, Kunsan, Korea J. Vac. Sci. Technol. A. 15(3), May/Jun 1997. |
| A21 | Negative ion-energy distributions & ion-neural reactions in SF6 Townsend discharges at high electric field-to-gas ratios (E/N) M.V.V.S. Rao, J.K. Olthoff, R. J. Van Brunt National Institute of Standards & Technology, Gaithersburg, MD 20899-001, USA. |
| A22 | Ion energy distributions in a dc biased rf discharge Michael Zeuner, Horst Neumann, Jurgen Meichsner* Institut für Oberflächenmodifizierung e.V., Permoser Straße 15, D-04318 Leipzig, Germany *Institut für Physik, Technische Universitäte Chemnitz, D-09107 Chemnitz, Germany J. Appl. Phys. 81 (7), 1 April, 1997. |
| A23 | Kinetic Energy Distribution of Nitrogen Ions in an Electron Cyclotron Resonance (ECR) Plasma Z.Y. Fan & N. Newman Dept of Electrical & Computer Engineering, Northwestern University, Evanston, IL 60208, USA Submitted to JVST A |
| A24 | Investigation of a SF6 helicon plasma P Chabert, *R W Boswell and C Davies Space Plasma Group, Plasma Research Laboratory, Research School of Physical Sciences & Engineering, Australian National University, Canberra ACT 0200, Australia * Present address: Laboratoire PRIAM-ONERA, F-91761 Palaiseau Cedex, France. J. Vac. Sci. Technol. A 16(1), Jan/Feb 1998, 78-86 |
| A25 | Characterization of a modular broad beam ion source Michael Zuener, Horst Neumann, Frank Scholze, Dieter Flamm, Michael Tartz, Frieder Bigl Institut für Oberflächenmodifizierung Leipzig, Permoser Str. 15, D-04318 Leipzig, Germany Submitted to Plasma Sources Science and Technology. |
| A26 | Internal & external electrical diagnostics of RF plasmas N St. J Braithwaite The Open University, Oxford Research Unit, Foxcombe, Berkeley Road, Boars Hill, Oxford, OX1 4HR Plasma Sources Sci. Technol. 6 (1997) 133-139 |
| A27 | Mass spectrometric studies of plasmas used for surface treatment J A Rees Hiden Analytical, 420 Europa Boulevard, Warrington, WA5 5UN, UK LE VIDE Plasma-Surfaces-Adhesion 1999 |
| A28 | The Energies of Positive & Negative Ions in an RF Plasma in Nitrous Oxide J A Rees, Claire L Greenwood & David L Seymour Hiden Analytical, 420 Europa Boulevard, Warrington, WA5 5UN, UK Jpn. J. Appl. Phys. Vol. 38 (1999) pp 4397-4399 |
| A29 | Studies of Ion Kinetic-Energy Distributions in the Gaseous Electronics Conference RF reference Cell J K Olthoff, R J Van Brunt & S B Radovanov National Institute of Standard & Technology, Gaithsburg, MD 20899-0001 Journal of Research of the National Institute of Standards & Technology, Vol 100, No. 4, July-August 1995 |
| A30 | Time-resolved measurements of ion energy distributions and optical emissions in pulsed radio frequency discharges Yicheng Wang, Eric C Benck, Martin Misakian, Manabu Edamura & James K Olthoff National Institute of Standards & Technology, Gaithersburg, Maryland 20899, USA J. Appl. Phys., Vol. 87, No. 5, 1 March 2000 |
| A31 | Analysis of Product Species in Capacitively Coupled C5F8 Plasma by Electron Attachment Mass Spectrometry Shinichi Ima(1) & Kunihide Tachibana(1, 2) ULSI Process Technology Development Center, Matsushita Electronics Corporation, 19 Nishikujo Kasugacho, Minami-ku, Kyoto 601-8413, Japan (1)Department of Electronic Science & Engineering, Kyoto University, Yoshida-honmachi, Sakyo-ku, Kyoto 606-8501, Japan Jpn. J. Appl. Phys., Vol. 38, (1999) pp L888-L891 |
| A32 | Mass-resolved ion energy distributions in continuous dual mode microwave/radio frequency plasmas in argon and nitrogen A Hillil, O Zabeida, M R Wertheimer & L Martinu Groupe des Couches Minces (GCM) & Department of Engineering Physics & Materials Engineering, Ecole Poilytechnique, Box 6078, Station "Centre-ville", Montreal, QC, H3C 3A7, Canada J. Vac. Sci. Technol. A 18(3), May/Jun 2000 |
| A33 | Pressure and input power dependence of Ar/N2H2 inductively coupled plasma systems Seongsoo Jang & Wonjong Lee Department of Materials Science & Engineering, Korea Advanced Institute of Science & Technology, 373-1 Kusung-dong, Yusung-gu, Taejeon, 305-101, Republic of Korea J. Vac. Sci. Technol. A 19(5), Sept/Oct 2001 2335-2343l. |
| A34 | Ion energy distributions in a pulse, electron beam-generated plasmas S G Walton, D Leonhardt, D D Blackwell, R F Fernsler, D P Murphy & R A Meger Plasma Physics Division, US Naval Research Laboratory, Washington, DC 20375, USA J. Vac. Sci. Technol. A 19(4), Jul/Aug 2001 1325-1329l. |
| A35 | Investigations of the plume accompanying pulsed ultraviolet laser ablation of graphite in vacuum Frederik Claeyssens, Robert J Lade, Keith N Rosser & Michael N R Ashfold School of Chemistry, University of Bristol, Bristol, BS8 1TS, UK Journal of Applied Physics, Vol 89, Number 1, 1st Jan, 2001 697-709l. |
| A36 | The distribution of ion energies at the substrate in an asymmetric bi-polar pulsed DC magnetron discharge J W Bradley(1), J Bäcker(1), Y Aranda-Gonzalvo(1), P J Kelly(2) & R D Arnell(2) (1) Dept of Physics, UMIST, Sackville Street, Manchester, M60 1QD, UK (2) Institute for Materials Research, University of Salford, M5 4WT, UK Plasma Sources Sci. Technol. 11 (2002) 165-174 |
| A37 | Time-resolved ion flux measurements in pulsed electron-beam-generated plasmas S G Walton, D Leonhardt, D D Blackwell, R F Fernsler, D P Murphy & R A Meger Plasma Physics Division, US Naval Research Laboratory, Washington, DC 20375, USA Physical Review. E Vol. 65, 2-Apr 2002, 046412-1/4. |
| A38 | Extraction of positive and negative ions from electron-beam-generated plasmas S G Walton, D Leonhardt, D D Blackwell, R F Fernsler, D P Murphy & R A Meger Plasma Physics Division, US Naval Research Laboratory, Washington, DC 20375, USA Applied Physics Letters, Vol 81 (No 6), 5-Aug 2002 987-989. |
| A39 | Energetic ion bombardment of the grounded anode in pulsed DC-glow discharges C V Budtz-Joøgensen*, K Bøttiger, P Kjringhø institute of Physics* & Astronomy, University of Aarhus, Ny Munkegade, 8000 Aarhus C, Denmark Applied Physics Letters, Vol 81 (No 6), 5-Aug 2002 987-989. |
| A40 | On the extraction of positive & negative ions from electron-beam-generated plasmas S G Walton, D Leonhardt, D D Blackwell, R F Fernsler & R A Meger Plasma Physics Division, Naval Research Laboratory, Washington, DC 20375, USA Applied Physics Letters, Vol 83 (No 4), 28 July 2003, 626-628 |
| A41 | Optical emission spectroscopy and energy-resolved mass spectrometry in pulsed DC magnetron discharges for ionized high-rate sputtering J Vlcek, P Belsky, A D Pajdarova, M Kormunda, J Lestina & J Musil Dept of Physics, University of West Bohemia, Univerzitni 22, 306 14 Plzen, Czech Republic Proceedings of the XIV International Conference on Gas Discharges & their Applications, 2004 |
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